Resources
ION-X® White Paper
A new class of materials, metal organic frameworks (MOFs), are bringing much needed material innovation back into the fab – enabling the semiconductor industry to take the next leap forward. …
SENTINEL™ Technical Datasheet
Technical information for Numat's SENTINEL™ portfolio. SENTINEL™ filtration enables next level chemical protection and decontamination in a single material, transforming how war fighters and front line workers are protected from…
Semiconductor Digest / Solid State Technology Article: Next Generation Dopant Gas Delivery System for Ion Implant Applications
This Semiconductor Digest / Solid State Technology article provides process and on-wafer performance of ION-X®, Numat's MOF-based dopant gas delivery system….
ION-X® Specifications – Phosphine
Specification information for ION-X®'s, Phosphine gas storage and delivery system. …
ION-X® Specifications – Boron Trifluoride
Specification information for ION-X®'s, Boron Trifluoride gas storage and delivery system. …
ION-X® Specifications – Arsine
Specification information for ION-X®'s, Arsine gas storage and delivery system. …
SENTINEL™ Technical Datasheet
Technical information for Numat's SENTINEL™ portfolio. SENTINEL™ filtration enables next level chemical protection and decontamination in a single material, transforming how war fighters and front line workers are protected from…
Semiconductor Digest / Solid State Technology Article: Next Generation Dopant Gas Delivery System for Ion Implant Applications
This Semiconductor Digest / Solid State Technology article provides process and on-wafer performance of ION-X®, Numat's MOF-based dopant gas delivery system….
ION-X® Specifications – Phosphine
Specification information for ION-X®'s, Phosphine gas storage and delivery system. …
ION-X® Specifications – Boron Trifluoride
Specification information for ION-X®'s, Boron Trifluoride gas storage and delivery system. …
ION-X® Specifications – Arsine
Specification information for ION-X®'s, Arsine gas storage and delivery system. …
ION-X® White Paper
A new class of materials, metal organic frameworks (MOFs), are bringing much needed material innovation back into the fab – enabling the semiconductor industry to take the next leap forward. …